FIELD: physics; measurement.
SUBSTANCE: present invention pertains to measuring technology, particularly to piezoresonance force transducers and can also be used in pressure and force sensors. The piezoresonance force transducer consists of a quartz bar made from two identical halves, sealed on the neutral plane of the cantilever bar, with an evacuated cavity. At least one piezoelectric resonator is fixed in the cavity parallel to the neutral plane of the cantilever bar. The cantilever bar is in form of bar of equal voltages. The piezoelectric resonator is fixed in the cavity through an extension piece, oriented in the direction of the main axis of the piezoelectric resonator. The cross-sectional area of the extension piece is larger than the cross-sectional area of the piezoelectric resonator. The outer surfaces of the bar, parallel its neutral plane, are polished.
EFFECT: increased sensitivity and wider range of measurements under high static pressure conditions.
5 cl, 2 dwg
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Authors
Dates
2009-01-20—Published
2006-07-17—Filed