FIELD: physics.
SUBSTANCE: device consists of a dipole magnet in which the magnetic field is created by permanent magnets and directed so that the beam describes the loop path and one or more magnetic quadrupoles that are located in front of the dipole magnet and serve to compensate for the difference in the focusing properties of the dipole magnet in different planes. Shielding of the electron gun from the workpiece is carried out by the walls of the vacuum chamber or the installation of protective screens.
EFFECT: ability to rotate the electron beam to a large angle without significant deterioration in quality, which allows you to remove the direct visibility between the cathode of the electron beam and the workpiece and protect the cathode and high-voltage region of the electron gun from vapours and small droplets of metal from the workpiece.
1 dwg
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Authors
Dates
2017-06-28—Published
2015-02-20—Filed