FIELD: raster electron microscopy. SUBSTANCE: proposed method provides for producing panoramic image of objects residing beyond region of their direct interaction with microscope electron beam by using changes in trajectory of microscope electron beam. To this end electron mirror effect is created at surface of specimen placed under microscope electron beam when acted upon by electron beam at accelerating voltage of 20 kV followed by reduction of this voltage to 1-10 kV. EFFECT: enlarged functional capabilities. 2 dwg
