PRESSURE DROP MEASURING MODULE WITH PIEZORESISTIVE SENSOR PROTECTED FROM OVERLOAD PRESSURE Russian patent published in 2017 - IPC G01L9/04 

FIELD: measuring equipment.

SUBSTANCE: device contains a two-piece cylindrical body, on the opposing end surfaces of which there are separation membranes. Inside the body there is a three-piece cylindrical body. In the first part of the body there is a strain-resistive sensor, and in the cavity at the boundary of the middle and the third parts of the body there is the first elastic compensation membrane and the additional second elastic compensation membrane. The membrane is located above the membrane with a gap between them. The gap is formed by welding the peripheral surfaces of the membranes with end ledges on the middle part of the body, located at different levels. Both elastic membranes are located on one side of the sensor and are corrugated with corresponding corrugations. The piezoresistive sensor is connected to the separation membranes and elastic compensating membranes by the pressure feed channels.

EFFECT: reducing the dimensions of the pressure measuring module while maintaining good performance.

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