FIELD: measuring equipment.
SUBSTANCE: device contains a two-piece cylindrical body, on the opposing end surfaces of which there are separation membranes. Inside the body there is a three-piece cylindrical body. In the first part of the body there is a strain-resistive sensor, and in the cavity at the boundary of the middle and the third parts of the body there is a membrane block fixed by a rigid center to the middle part of the body and comprising two elastic compensating membranes. Herewith the membrane of the block is located one above the other with a gap between them, formed by an annular insert welded with membranes along the outside diameter. Both elastic membranes of the block are made corrugated with corresponding corrugations. The piezoresistive sensor is connected to the separation membranes and elastic compensating membranes by the pressure feed channels.
EFFECT: reducing the dimensions of the pressure measuring module while maintaining good performance.
2 dwg
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Authors
Dates
2017-06-06—Published
2016-04-05—Filed