PRESSURE TRANSDUCER Russian patent published in 2015 - IPC G01L9/00 

FIELD: instrumentation.

SUBSTANCE: invention relates to measuring techniques and processes and can be used for in various fields related with medium pressure difference measurements. Solid-state pressure difference transducer comprises semiconductor silicon membrane, strain gage composed of bridge circuit of resistive-strain sensors, first stop element and second stop element. First stop element is made of silicon and comprises stop ledge opposite semiconductor membrane groove. Stop recess opposite semiconductor membrane central ledge arranged with clearance with membrane central ledge as well as central through bore. Stop element flat side is secured on glass substrate of material with heat conductivity factor of glass and having central through bore aligned with that of the first stop element. Second stop element is made of silicon and comprises second central stop ledge surrounded by first groove. Besides, stop ledge surrounded by second groove is arranged with clearance relative to membrane back side opposite the groove of semiconductor membrane.

EFFECT: higher reliability and efficiency of pressure transducer during and after short-term multiple loads.

2 dwg