DEVICE FOR THE CONTACT MEASUREMENT OF ELECTROMAGNETIC PARAMETERS OF THIN FILMS Russian patent published in 2017 - IPC G01R27/00 

FIELD: measuring equipment.

SUBSTANCE: device relates to instrumentation and can be used for contactless operational measurement of specific electrical conductivity, as well as dielectric and magnetic permeabilities of thin films and nanomaterials. The device consists of a generator 1 whose output is connected to the input of the emitter of the electromagnetic signal 2 connected to a splitter 3 whose first output is connected to the input of the reference receiver 4 connected to the input of the signal parameter meter 5 and the second output of the splitter is connected to the input of the additional coupler 6, the first output of which is connected through the monitoring object 7 to the input of the first signal receiver 8 connected to the signal parameter meter 5, and the second output of the additional coupler ene with input of the second receiver 9 through a sample of the reference material with known electromagnetic parameters 10 and is connected to an input of measuring parameters of the signal 5 whose output is connected to the processing device inputs 11 and 12 of the control device, which in turn is connected to the input of generator 1.

EFFECT: reduction of the measurement error in the study of thin films having a small reflection coefficient while maintaining the possibility of complex measurements simultaneously of the three electromagnetic parameters of the material being monitored.

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