ELLIPSOMETER Russian patent published in 2017 - IPC G01N21/21 

FIELD: measuring equipment.

SUBSTANCE: ellipsometer includes the radiation source, the polarizer arm and the analyzer arm, which are arranged along the optical axis. Moreover, the analyzer arm is made in the form of a non-polarizing beam splitter, dividing the beam of light rays that came from the test sample into two parts. Wherein, the beam of light rays reflected from the non-polarizing beam splitter is incident on the first polarizing beam splitter, dividing it into two linearly polarized light streams with orthogonal directions of the polarization plane, and the transmitted beam of light rays hits the compensator, which introduces a known phase shift between the orthogonal linearly polarized components of the light wave, then it is incident on the second polarizing beam splitter. Then, all four luminous fluxes are fed to the input of a four-channel spectrometer.

EFFECT: finding 16 components of the Mueller matrix and increasing the measurement speed in a wide spectral range.

8 cl, 3 dwg