ELLIPSOMETER Russian patent published in 2009 - IPC G01N21/21 

FIELD: physics.

SUBSTANCE: uniform measuring channel with functions of phase and peak channels, with equal gear transmission polarised light builder is executed in arm of ellipsometer analyser. The channel contains shaper of quasiparallel light beams, jack and polarisation beam splitter separating them on polarised light components. Linearly the polarised beam, leaving the polariser arm with delivery on explored the sample, being reflected from it elliptically polarised, arrives on the shaper of the quasiparallel light beams in the form of a double diaphragm. The diaphragm cuts out the light bundles arriving on the jack from two phase-shifting plates with holes. One of the quasiparallel light beams, due to the holes, transits the jack without phase detrusion, and another - with phase detrusion. Then the polarisation splitter in the form of two-refractive prism splits both bundles on orthogonally polarised light builders registered by moving-image camera.

EFFECT: accuracy of measurings is raised.

13 cl, 3 dwg