METHOD OF DETERMINING MULLER MATRIX Russian patent published in 2016 - IPC G01N21/21 G01J4/04 

FIELD: measuring equipment.

SUBSTANCE: invention relates to optical measurements and can be used for complete polarisation state determination of light reflected from surface of analysed sample. To determine Muller matrix, analysed sample is illuminated with polarised light beam and measuring change in polarization using separation of reflected beam on p- and s-component with decomposition of amplitude and phase to obtain at outlet of four light beams with intensities I_Ψ1, I_Ψ2, I_Δ1, I_Δ2, wherein azimuth angles of optical elements receiving fixed values in certain combinations, polariser is fixed in positions P = 0°, -45°, +45°, analyzer in amplitude channel A_Ψ= 0°, 45°, phase channel A_Δ= 45°, Fresnel rhombus R = 0 and measurements corresponding to following configurations: A: P45SR0W_Ψ45W_Δ45; B: P45SR0W_Ψ0W_Δ45; F: P0SR0W_Ψ45W_Δ45; E: P0SR0W_Ψ0W_Δ45. Change state of polarisation of incident light on specimen with linear on circular, each optical channel before sample retarder in position D = 0° and measurements corresponding configurations C: P-45D0SR0W_Ψ0WΔ45; D: P-45D0SR0W_Ψ45W_Δ45, while components of Muller matrix S_ij is determined by solving system of linear equations.

EFFECT: invention enables complete determining polarisation state of light reflected from surface of analysed sample, for location of all components of Muller matrix.

1 cl, 1 dwg