TWO-WAY VELOCITY ELLIPSOMETER Russian patent published in 2021 - IPC G01J4/04 G01N21/21 

FIELD: optical instrumentation.

SUBSTANCE: invention relates to the field of optical instrumentation and relates to an ellipsometer. The ellipsometer includes a polarizer unit with a radiation source and an analyzer unit, which contains Glan-Thompson prisms, arranged in series along the optical axis. In the polarizer, two identical sets of semiconductor radiation sources covering the selected spectral range are used as a radiation source. The polarizer additionally contains two photodetectors and two beam splitters located in front of the Glan-Thompson prism and directing the radiation to the photodetectors. The analyzer block is structurally completely identical to the polarizer block.

EFFECT: invention increases sensitivity of the device, improving reproducibility of ellipsometric parameters and increasing the measurement speed.

4 cl, 2 dwg