METHOD OF IMITATION TESTING INSTRUMENT STRUCTURE RESISTANCE TO IRRADIATION BY FAST NEUTRONS (VERSIONS) Russian patent published in 2017 - IPC H01L21/66 

FIELD: physics.

SUBSTANCE: instrument structure is affected by equivalent irradiation with ions and fluency of 10⁹ cm^-2 up to 10¹⁵ cm^-2 and energy in the range of 1-500 Kev specified depending on the composition and morphology of the structure, while updating the value of fluence and ion energy that is the equivalent, determined by calculation, by computer modelling the distribution and concentration of displaced atoms during ion irradiation in the sensitive areas of the instrument structures and comparisons with results of the same computer simulation for fast neutron irradiation. To establish the correctness of calculation of equivalent fluence, fluence of ion irradiation is chosen, where a change in the main parameters exceeds the sensitivity threshold controls of the main parameters, the corresponding equivalent irradiation fluence with fast neutrons is determined, a one-time field test is conducted by irradiation of the instrument structures with fast neutrons at equivalent fluence, the resulting deviation of the main parameters is compared to the deviation for the selected fluence of ion irradiation and according to the comparison result the correctness of the calculation of equivalent fluence is judged.

EFFECT: increasing the reliability of test results, reducing test time, using the equipment available to researchers.

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