FIELD: chemistry.
SUBSTANCE: method of manufacturing multi-electrode gas-analytical chip based on titanium dioxide nanotube membranes include formation of ordered array of nanotubes TiO2 from titanium by electrochemical anodization in fluoride electrolyte with the consequent dissolution of the titanium substrate in methyl alcohol with the addition of bromine, and washing the resulting membrane in alcohols and drawing it from the solution to the chip substrate surface on which the strip electrodes are formed (or were preformed earlier) to enable electrical measurements of resistances of the membrane sites. In the operation the chip is exposed to the gas environment, the resistance change in segments of titanium dioxide nanotube membrane is recorded, placed between each pair of the strip electrodes, and the vector signal is treated from the entire set of segments by methods of pattern recognition to determine the gas composition.
EFFECT: producing a highly sensitive and gas-selective multi-electrode gas analyzer chip in a simple method with a low cost.
5 cl, 9 dwg
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