ULTRAFAST AND ULTRASENSITIVE HYBRID SUPERCONDUCTING WAVEGUIDE SINGLE-PHOTON DETECTOR WITH LOW DARK COUNT RATE Russian patent published in 2018 - IPC H01L31/02 B82B1/00 

FIELD: physics.

SUBSTANCE: ultrafast and ultrasensitive hybrid superconducting waveguide single-photon detector with a low dark count rate includes a sensitive nanowire from a superconducting NbN film located on a nanowave guide Si₃N₄, and a protective dielectric-metallic coating consisting of an SiO₂ dielectric layer and a layer of Al metal deposited over the nanowire.

EFFECT: providing the possibility of reducing false triggering of a superconducting single-photon waveguide detector and increasing the sensitivity of the superconducting single-photon waveguide detector.

3 dwg