MATERIAL FOR GAS-THERMAL APPLICATION, METHOD OF ITS MANUFACTURE AND METHOD OF ITS APPLICATION Russian patent published in 2018 - IPC C23C4/10 

FIELD: chemistry.

SUBSTANCE: invention relates to the field of gas-thermal formation of layers and coatings and is intended primarily for the production of targets for magnetron, electron-beam and ion-beam sputtering. Powder material for gas-thermal application contains powder not less than 50% of the mass consisting of particles, each of which is a granule having a size of 1.0 μm to 100 μm, containing nanoparticles fastened together with sizes up to 0.1 μm, each of which, in turn, consists of a core of metal oxide with a metal coating, consisting of one or more metals, alloys or intermetallic compounds, or from a combination thereof with a melting point lower than the melting point of the core by not less than 10% and a volume of 2% to 10% of the core volume, and also contains additional impurities or in the composition of a part of the nuclei, or in the composition of all nuclei, or outside the nuclei.

EFFECT: use of the invention reduces the unproductive consumption of the material and improves the quality of the coating obtained.

5 cl, 3 ex, 3 dwg