METHOD FOR PUMPING IN A SYSTEM OF VACUUM PUMPS AND SYSTEM OF VACUUM PUMPS Russian patent published in 2018 - IPC F04C25/02 F04C18/16 F04C28/06 

FIELD: motors and pumps.

SUBSTANCE: group of inventions refers to method for evacuating in vacuum pump system and system of vacuum pumps. Vacuum pump system comprises primary dry screw vacuum pump (3) having gas inlet (2) connected to vacuum chamber (1), and gas outlet (4) communicating with the channel (5) before the outlet (8) of the system gases, a non-return valve (6) positioned in the duct (5) between the gas outlet orifice (4) and the outlet (8), and an ejector (7) connected in parallel to the non-return valve (6), compressor, started up by at least one of the pump (3) shafts. Dry primary screw vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) through the gas outlet orifice (4). Simultaneously, the ejector (7) is supplied with pump fluid by compressor. Ejector (7) continues to be supplied with pump fluid for the entire time that the dry primary screw vacuum pump (3) pumps the gases contained in the vacuum chamber (1).

EFFECT: group of inventions is aimed at improving ultimate vacuum and increasing flow rate.

22 cl, 2 dwg