FIELD: motors and pumps.
SUBSTANCE: group of inventions relates to the field of vacuum technology. Pump system (SP), designed to create a vacuum, includes main oil-free screw pump (3), which has suction inlet (2) for gas, connected to vacuum chamber (1), and outlet (4) for blowing gas out to gas discharge channel (5) in the direction of outlet (8) for gas to exit the pumping system. System (SP) includes non-return valve (6) located between outlets (4, 8) and auxiliary vacuum pump (7) connected in parallel with valve (6). Pump (3) is driven to pump out the gas in chamber (1) and to blow out this gas through outlet (4), while pump (7) is also activated. Pump (7) continues to work all the time during which pump (3) evacuates gas from chamber (1), and / or all the time during which pump (3) maintains a certain pressure in chamber (1).
EFFECT: group of inventions is aimed at ensuring the possibility of obtaining a high vacuum and high pumping speed at low pressure, which can be obtained using a single vacuum oil-free screw pump, and also aims to reduce the amount of electricity needed to create and maintain a vacuum in a vacuum chamber and to reduce the temperature of the outgoing gas.
15 cl, 2 dwg
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Authors
Dates
2018-10-24—Published
2014-09-26—Filed