FIELD: measuring equipment.
SUBSTANCE: use to create a differential pressure sensor. Essence of the invention lies in the fact that the sensor for measuring pressure drops contains an electronic chip and a sensor chip inside the functional volume, which has a maximum length of 4–5 mm, a maximum width of 2–3 mm and a maximum height of 0.5–0.8 mm, wherein the sensor chip is configured to measure a pressure drop in the range of 10–500 Pa.
EFFECT: enabling the creation of a compact sensor measuring very small pressure drops in the range of 10–500 Pa.
15 cl, 6 dwg
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Authors
Dates
2018-08-21—Published
2015-07-23—Filed