FIELD: of sensor technology and nanotechnology.
SUBSTANCE: inventions group relates to the field of sensor technology and nanotechnology, in particular, to the manufacture of gas sensors and gas analytical multisensor lines. The gas detector includes a dielectric substrate, coplanar strip electrodes located on the substrate, thermistors and heaters, wherein at least part of the electrode surface and the substrate between the electrodes are covered with a layer of gas-sensitive material that changes resistance under the influence of impurities of organic vapors or water vapors in the ambient air. As the material of the gas-sensitive layer, a composite (Am-MeOx) based on aminated graphene (Am) with a content of primary amines of at least 4 at.% is used, on the surface of which nanoparticles of metal oxides (MeOx, where Me is a metal, x = 1 or 2 ), such as zinc oxide (ZnO), tin dioxide (SnO2), titanium dioxide (TiO2), cerium oxide (CeO) or copper oxide (CuO), with particle sizes from 10 nm to 20 nm and the distance between individual nanoparticles or their clusters is not less than 5 nm and not more than 50 nm, while the composite layer is made of variable thickness from 35 nm to 300 nm.
EFFECT: invention provides increased gas sensitivity and efficiency of gas recognition.
11 cl, 23 dwg
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Authors
Dates
2022-07-18—Published
2021-11-22—Filed