BROADBAND TERAHERTZ RADIATION DETECTOR (VARIANTS) Russian patent published in 2019 - IPC G01J5/02 

FIELD: electrical engineering; antenna technology.

SUBSTANCE: invention relates to the field of thin-film microwave microelectronics and antenna technology, including antenna arrays and metamaterials. Broadband terahertz radiation detector consists of a distributed absorber in the form of a matrix of antennas in the metamaterial configuration, microbolometers connected to each element of the metamaterial. Each element of the metamaterial matrix has a symmetrical shape to ensure the same sensitivity to both polarizations, the matrix elements are electrical closed circuits. Behind the metamaterial absorber is an additional plane, separated from the metamaterial by a dielectric layer. Antenna array is made of strongly interacting annular electrically small planar antennas in the metamaterial configuration, gap of which includes four bolometers of the Superconductor-Insulator-Normal metal-Insulator-Superconductor structure, connected in series by a bias current and a read signal.

EFFECT: technical result consists in expanding a spectral matching band, increasing the detector speed, reducing the labor intensity and device manufacturing time, reducing the number of technological operations and the application of standard methods and materials of thin-film microelectronics.

5 cl, 3 dwg