METHOD FOR PRODUCING THIN DIAMOND FILMS Russian patent published in 2019 - IPC C23C14/28 C23C14/06 C30B23/06 C30B28/12 C30B30/00 C30B29/04 C01B32/26 B82B3/00 B82Y30/00 B82Y40/00 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to a method for producing thin diamond films and can be used in various fields of industry and science to produce thin-film hardening coatings and active layers of thin-film nanostructures. Method for producing thin diamond films on a substrate is proposed by vacuum laser action on targets and condensation of carbon on substrates, where pre-compacted detonation nanodiamond tablets and tablets from high-purity graphite used as targets, and the laser exposure is carried out in two steps: first, by a focused laser radiation based on yttrium aluminum garnet at wavelength of 1,064 nm with series of 10–20 pulses with pulse energy of 3.8–5.8 J, dispersing a target from a detonation nanodiamond and forming nanodiamond nucleation centers on the substrate; then fill the gaps between nucleation centers with carbon with mainly sp3-bonds condensed from a vapor-gas phase obtained by evaporation of the target from high-purity graphite by means of a defocused laser radiation of the same laser with pulse energy intensity of not lower than 1.6⋅10⁴ W/cm². During condensation of carbon onto the substrate pre-populated with nucleating centers, mainly with size of 5.73 nm, observe their growth to particles with the size of about 285.15 nm. Set of such particles (islands) forms a flat thin-film close-packed hexagonal structure, which is a polycrystalline aggregate of islands, crystallographic similarly oriented relative to the film surface.

EFFECT: method for producing thin diamond films is proposed.

1 cl, 10 dwg, 3 tbl, 5 ex