FIELD: manufacturing technology.
SUBSTANCE: invention relates to production of thin diamond films. Method for controlling the structural state of diamond-like thin films involves scanning a surface of films with a probe of a scanning probe microscope in tunnel current mode, and geometric parameters of structural objects, which are sets of current channels, in which carbon atoms with sp2-bonds form a graphite phase, and non-conducting diamond fragments formed by carbon atoms with sp3-bonds, are determined by Fourier analysis.
EFFECT: invention can be used for operative control of structural state (distribution of sp2-and sp3-bonds).
1 cl, 4 dwg
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