Show metadata Hide metadata

(19)

(11)

2 668 246

(13)

(51)

IPC

C30B23/02(2006-01-01)

C23C14/06(2006-01-01)

C23C14/18(2006-01-01)

C23C14/28(2006-01-01)

C30B29/04(2006-01-01)

C01B32/26(2017-01-01)

C30B30/00(2006-01-01)

B82B3/00(2006-01-01)

B82Y30/00(2011-01-01)

B82Y40/00(2011-01-01)

(21) (22)

Application

2016150202, 2016-12-19

(24)

Start date

2016-12-19

(22)

Actual filing date

2016-12-19

(45)

Published

2018-09-27

(72)

Inventor

Plotnikov Vladimir AleksandrovichDemyanov Boris FedorovichMakarov Sergej ViktorovichYartsev Vladimir Ivanovich

(73)

Holder

Federalnoe Gosudarstvennoe Byudzhetnoe Obrazovatelnoe Uchrezhdenie Vysshego Obrazovaniya Gosudarstvennyj Universitet"

METHOD FOR PRODUCTION OF DIAMOND-LIKE THIN FILMS Russian patent published in 2018 - IPC C30B23/02 C23C14/06 C23C14/18 C23C14/28 C30B29/04 C01B32/26 C30B30/00 B82B3/00 B82Y30/00 B82Y40/00

Abstract RU 2668246 C2

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the production technology of thin diamond films and can be used in various fields of industry and science to produce thin-film hardening coatings and active layers of thin-film nanostructures. Diamond-like film is obtained by condensing carbon on a glass substrate of the vapor-gas phase, obtained by evaporation of a target from high-purity graphite due to the action in vacuum of defocused laser radiation with a wavelength of 1,064 nm, a spot diameter of 3 mm, a pulse energy intensity of 1.6⋅10⁴ W/cm² and the pulse duration is not less than 8 ms.

EFFECT: invention makes it possible to obtain films with a thickness of up to 100 nm or more with a homogeneous structure.

1 cl, 4 dwg, 3 ex, 1 tbl

Similar patents RU2668246C2

Title	Year	Author	Number
METHOD FOR PRODUCING THIN DIAMOND FILMS	2017	Plotnikov Vladimir Aleksandrovich Makarov Sergej Viktorovich Makrushina Anna Nikolaevna Zyryanova Anastasiya Igorevna Shutkin Aleksej Aleksandrovich	RU2685665C1
METHOD OF CONTROLLING THE STRUCTURAL STATE OF DIAMOND-LIKE THIN FILMS	2019	Makarov Sergej Viktorovich Plotnikov Vladimir Aleksandrovich	RU2723893C1
METHOD FOR SWITCHING THE CARRIER TYPE IN CARBON DIAMOND-LIKE FILMS	2022	Plotnikov Vladimir Aleksandrovich Makarov Sergej Viktorovich Shutkin Aleksej Aleksandrovich	RU2791963C1
METHOD TO PRODUCE DIAMOND-LIKE COATINGS BY COMBINED LASER ACTION	2012	Grigor'Jants Aleksandr Grigor'Evich Misjurov Aleksandr Ivanovich Shupenev Aleksandr Evgen'Evich	RU2516632C1
METHOD FOR PRODUCING THIN NANODIAMOND FILM ON GLASS SUBSTRATE	2015	Plotnikov Vladimir Aleksandrovich Yartsev Vladimir Ivanovich Solomatin Konstantin Vasilevich	RU2614330C1
MANUFACTURING METHOD OF FUNCTIONAL ELEMENT OF SEMICONDUCTOR DEVICE	2019	Kukushkin Sergej Arsenevich Osipov Andrej Viktorovich Feoktistov Nikolaj Aleksandrovich	RU2727557C1
METHOD FOR MODIFYING SURFACES OF PLATES OF A BRAZED PLATE HEAT EXCHANGER	2020	Shupenev Aleksandr Evgenevich Korshunov Ivan Sergeevich Fokin Yurij Olegovich Onishchenko Dmitrij Olegovich	RU2754338C1
ARTICLE CONTAINING A SILICON BASE AND A COATING LAYER IN THE FORM OF A NANOFILM OF CARBON WITH A DIAMOND-TYPE CRYSTAL LATTICE, AND A METHOD OF MAKING SAID ARTICLE	2019	Kukushkin Sergej Arsenevich Osipov Andrej Viktorovich Feoktistov Nikolaj Aleksandrovich	RU2715472C1
METHOD OF PRODUCING QUANTUM DOTS	2023	Zatsepin Anatolij Fedorovich Pryakhina Viktoriya Igorevna Zatsepin Dmitrij Anatolevich Bukhvalov Danil Vladimirovich Kuznetsova Yuliya Alekseevna	RU2824336C1
METHOD OF OBTAINING NANOSIZED CARBON LAYERS WITH DIAMOND PROPERTIES	2013	Semenov Aleksandr Petrovich Semenova Irina Aleksandrovna	RU2532749C9

RU 2 668 246 C2

Authors

Plotnikov Vladimir Aleksandrovich

Demyanov Boris Fedorovich

Makarov Sergej Viktorovich

Yartsev Vladimir Ivanovich

Dates

2018-09-27—Published

2016-12-19—Filed