FIELD: manufacturing technology.
SUBSTANCE: invention relates to the production technology of thin diamond films and can be used in various fields of industry and science to produce thin-film hardening coatings and active layers of thin-film nanostructures. Diamond-like film is obtained by condensing carbon on a glass substrate of the vapor-gas phase, obtained by evaporation of a target from high-purity graphite due to the action in vacuum of defocused laser radiation with a wavelength of 1,064 nm, a spot diameter of 3 mm, a pulse energy intensity of 1.6⋅104 W/cm2 and the pulse duration is not less than 8 ms.
EFFECT: invention makes it possible to obtain films with a thickness of up to 100 nm or more with a homogeneous structure.
1 cl, 4 dwg, 3 ex, 1 tbl
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