METHOD OF MEASURING TEMPERATURE Russian patent published in 2019 - IPC G01R33/00 G01K11/00 B82Y35/00 B82Y20/00 G01N21/64 G01J1/58 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to nanotechnology and can be used in measurement of local weak temperature fields with micro- and nanosized resolution in microelectronics, biotechnologies, etc. Disclosed is a method of temperature measurement, which includes preliminary construction of experimental calibration curve of dependence of magnetic field value in point of cross-relaxation (CR) of energy levels of spin centers with main quadruplet spin state S = 3/2 and spin centers with a triplet spin state S = 1 contained in a silicon carbide crystal of a hexagonal or rhombic polytype, on temperature. Experimental calibration curve is constructed by exposing the said silicon carbide crystal to focused laser radiation, varying by a constant magnetic field, a low-frequency alternating magnetic field. Photoluminescence intensity (PL) of the spin centers with the main quadruplet spin state S = 3/2 is measured at each temperature. In the photoluminescence intensity variation region, a photoluminescence intensity variation curve is measured as a function of the constant magnetic field and a magnetic field value corresponding to each temperature is determined from a point of inflection of the signal in the form of a derivative corresponding to the CR of energy levels of said spin centers in a magnetic field. Then the analyzed sample is placed on the surface of said silicon carbide crystal. Photoluminescence intensity of the spin centers with the main quadruplet spin state S = 3/2 is measured for different values of the constant magnetic field. In the photoluminescence intensity variation region, the photoluminescence intensity variation curve depends on the constant magnetic field value. Magnetic field is determined from the point of spinning point energy levels of spin centers, from which the temperature at the point of the surface of the analyzed sample corresponding to the focal point of the laser radiation is determined using an experimental calibration curve.

EFFECT: technical result is high sensitivity of temperature measurements.

5 cl, 1 dwg