AXIAL ELECTRON GUN Russian patent published in 2019 - IPC H01J37/65 

Abstract RU 2699765 C1

FIELD: technological processes.

SUBSTANCE: invention relates to electron-beam processing of materials in vacuum or atmosphere of reactive gases. Axial electron gun comprises primary and secondary cathodes and is characterized by that in order to maintain stable position of secondary cathode relative to electron-beam axis of axial gun shaped form holder is used, and for bombardment of secondary cathode by electrons between cathodes pulsed voltage is applied.

EFFECT: higher stability of process parameters and reliability of electronic gun operation.

1 cl, 8 dwg

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RU 2 699 765 C1

Authors

Timashov, Victor Alexandrovich

Tsepkalov, Andrey Anatolyevich

Ryabenko, Sergey Ivanovich

Belyavin, Aleksandr Fyodorovich

Marynskiy, Georgiy Sergeevich

Filippov, Aleksey Vladislavovich

Dates

2019-09-10Published

2017-06-09Filed