METHOD OF DETERMINING MUTUAL POSITION OF OVERLAPPING OPTICAL BEAMS Russian patent published in 2019 - IPC G01J1/42 

FIELD: optics.

SUBSTANCE: invention relates to measurement optics. Disclosed method of determining the mutual position of overlapping optical beams involves modulating optical beams and detecting light fluxes of the beams using a photodetector. Optical beams are modulated by passing each n-th optical beam from a set of N optical beams through a separate light modulator, performing change in the intensity of the optical beam according to law 1+Un(t), where Un(t) is an orthogonal Walsh function. Optical beams are then collected in a focal plane using an optical system. Opaque screen is moved along the focal plane along one or two coordinates from the position when all optical beams are open to a position when all optical beams are closed to allow gradual overlapping of the optical beams. Recording the light flux of each of the N optical beams is carried out in the form of an orthogonal function by means of a photodetector installed behind the screen near the focal plane, with a multichannel receiver of orthogonal signals connected to it. One or two coordinates corresponding to the position of said screen in the focal plane are simultaneously recorded. According to the obtained data for each of the N beams, the dependence of the light flux on the coordinates of the screen is determined, numerical differentiation of optical beam light flux dependences from screen position coordinates is performed to obtain intensity distribution of optical beams on the screen and mutual arrangement of overlapping beams is determined from the distance between centers of masses of optical beams. Providing submicron accuracy of measurement of mutual position of optical beams by distribution of intensity of each beam in focal plane, and also reduced time of measurements.

EFFECT: provision of submicron accuracy of measurement of mutual position of optical beams with determination of intensity distribution of each beam in focal plane with considerable reduction of measurement time.

1 cl, 9 dwg