FIELD: instrument engineering.
SUBSTANCE: invention relates to instrument-making, namely to devices for angular velocity measurement. Micro-optoelectromechanical sensor of angular speed is made on the basis of wave solid-state gyroscope and optical tunnel effect, contains sensitive element made in the form of annular resonator, four optical radiation transceiving channel, a control unit, an information processing unit, wherein the electronics unit includes a correction unit comprising two amplifying and multiplying devices, processing unit consisting of an additive-subtracting device and an amplifier, further calculates a linear acceleration value along two axes, wherein four inputs of the summing-subtractor are connected to outputs of optical radiation transceiving channels, three signals generated by the summing-subtracting device are supplied to the inputs of three amplifiers, the outputs of which are connected to inputs of the multiplying device.
EFFECT: high accuracy of the angular velocity sensor.
1 cl, 1 dwg
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