GAS-ELECTRIC ISOLATION Russian patent published in 2019 - IPC H01J27/00 F03H1/00 

FIELD: physics.

SUBSTANCE: invention relates to plasma engineering. Gas-electric isolation (GEI) is included into the working medium supply channel into the gas-discharge chamber of the charged particles source. Inlet and outlet branch pipes (1, 2) are made of electrically conductive material. In dielectric housing (3) there is a flow channel, the length of which exceeds its maximum diameter. Flow channel (4) has axisymmetric shape and is made with narrowing formed by annular projection (5) on channel surface. Gas-permeable insert is made of electrically conductive material and is installed at the inlet into the outlet branch pipe (2) with formation of electric contact with the outlet branch pipe. Insert is formed by series-installed gas-permeable elements (6) with a porous structure. Surfaces of nearby gas-permeable elements (6), through which gas exchange is performed, contact each other. Elements (6) are made from powder electrically conductive material by powder metallurgy. Open pores of each gas-permeable element (6) form curvilinear channels connecting flow channel (4) with outlet branch pipe (2). Optimum values of degree of porosity of gas-permeable elements (6) range from 30 % to 50 %. Gas-permeable elements are made in the form of a disk, the opposite flat surfaces of which face the inlet and outlet branch pipes.

EFFECT: gas-electric isolation is proposed.

6 cl, 1 dwg