METHOD FOR NON-CONTACT ASSESSMENT OF CONDUCTIVITY OF INDIVIDUAL CARBON NANOTUBES Russian patent published in 2020 - IPC G01R27/00 B82B1/00 

FIELD: physics.

SUBSTANCE: use for determination of electrophysical parameters of individual carbon nanotubes. Essence of the invention is that a method for contactless evaluation of conductivity of individual carbon nanotubes of given synthesis, in which: first, the nanotubes are placed on a first substrate containing a structure with microcontacts, then, the probe detects i nanotubes from nanotubes lying on two adjacent microcontacts using AFM scanning by a semi-contact method, after which two steps of calibration measurements are carried out for each of the i nanotubes, at the number of detected not less than five i≥5, at the first stage on AFM-images the length and diameter of each i nanotube is determined, then the probe captures the current of the nanotube i and, using the values of the length and diameter, calculates the conductivity σ_i of each of the i nanotubes, at the second stage, the profile of the ECM image of each of the nanotubes i is measured and the voltage U_i is calculated for each i of the nanotube, then, based on average values of σ_i and U_i, calibration dependence U=<U_i(σ_i)> is constructed, then N carbon nanotubes of given synthesis are placed on the second substrate so that N carbon nanotubes are distributed chaotically, by attaching to substrate by side surface, after that, the probe detects m individual carbon nanotubes, using AFM scanning by a semi-contact method, then the EMI image of each m individual carbon nanotube is recorded, and the voltage U_m is calculated and, using the corresponding voltage value U_i from the calibration curve U=<U_i(σ_i)> constructed on the preliminary measurements, determining specific conductivity σ_m of each m individual carbon nanotube using electrostatic force microscopy method.

EFFECT: possibility of non-contact evaluation of conductivity of individual carbon nanotubes.

1 cl, 4 dwg