FIELD: physics.
SUBSTANCE: used for the manufacture of high-sensitivity receivers of electromagnetic radiation of terahertz range. Essence of the invention lies in the fact that an array of sensitive elements is formed during the selective etching of a homogeneous CNT grid using a lithographic mask in the form of an array of rectangles measuring 8*4 mcm2, formed in the process of photolithography.
EFFECT: providing the possibility of simplifying the technology of manufacture of detectors, and the geometry of the antennas allows detecting radiation from 100 GHz to 3 THz.
1 cl, 2 dwg
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