METHOD OF SELECTING OPTICAL MODES IN MICRORESONATORS USING NANOANTIBODIES Russian patent published in 2020 - IPC H01L21/36 B82B3/00 

FIELD: physics.

SUBSTANCE: invention relates to formation of microstructures for use in various optoelectronic devices, and more specifically to generation of laser microresonators having single-frequency radiation spectrum. Object of present invention is to develop simple in implementation of method of selection of modes in microlasers working at room temperature, which would be effective with respect to all types of modes of the microresonator, both radial and azimuthal. In the microresonator optical modes selection method, an axisymmetric microresonator is formed by etching the layered semiconductor structure, forming a nano antenna adjacent to the outer side surface of the microresonator and elongated in a direction perpendicular to layers of the layered semiconductor structure, nano antenna is formed under the action of a focused electron beam in the presence of a precursor gas.

EFFECT: technical result, which enables to accomplish the task, is to increase the radiation intensity of the laser mode of the optical microresonator by 20 times and to increase the side mode suppression ratio by 14 dB.

9 cl, 8 dwg