METHOD FOR MANUFACTURING OF ELECTRODE ASSEMBLY OF MOLECULAR-ELECTRONIC SENSOR OF LINEAR AND ANGULAR DISPLACEMENTS Russian patent published in 2020 - IPC G01P15/08 

FIELD: electricity.

SUBSTANCE: invention relates to methods of making electrode units of molecular-electronic sensors of linear and angular displacements of ampoule type. Electrode assembly consisting of two pairs of mesh electrodes isolated by three dividers, having through holes for working fluid passage, are made by metallisation of separators from dielectric crystalline material ground with optical accuracy by applying a conductive paste with metal nanoparticles with subsequent heat treatment and burning of metal particles into surface of separator, note here that one of said separators is metalized on both sides. Grid electrodes are made on metallized surfaces of separators by laser removal of metalized surface fragments according to preset scheme. Separator, on both sides of which there are mesh electrodes, is selected by electrode element central element, and the separators with mesh electrodes on one of the surfaces serve as peripheral elements of the electrode assembly. On the free surface of the peripheral element, projections are made by milling in dielectric material according to a given pattern to provide gaps when assembling the central and peripheral elements in a package with parallelism and conformity of mesh electrodes. Laser perforation of the packet is performed with making through holes in the dividers in the areas complementary to the mesh electrodes, mainly as per a matrix equidistant arrangement of the holes. Electric contacts to the mesh electrodes are made through holes made in the volume of the separator from the dielectric material, with further fixation. Thermal diffusion metallisation of the polished dielectric plate of the separator with conductive paste with metal nanoparticles to obtain an inextricable bonding electrode-separator, arrangement of the structure of the assembly from the central, metallized on both sides, and peripheral elements separated by projections with gaps of equal width, making the mesh electrode by removing metalized surface fragments according to a predetermined pattern, assembly of structural elements of the assembly with provision of conformity and parallelism of mesh electrodes in a package and laser perforation of through holes in a package in areas, which are complementary to conducting elements of mesh electrode. Invention reduces electrode noise of electrode assembly, increases sensitivity and obtains frequency characteristic close to analytical one.

EFFECT: lower noise of the electrode assembly, high sensitivity and obtaining a frequency characteristic close to the analytical one.

12 cl, 10 dwg