FIELD: technological processes.
SUBSTANCE: invention relates to device for ionisation of cluster ions. Device includes anode (1), cathode (2), ceramic base (3) and electron reflector (4). Anode (1) and cathode (2) are fixed on ceramic base (3). Cathode (2) is made of material with low emission temperature. Anode (1) is made of a hollow annular cylinder, on radial opposite walls of which along the entire height parts of surfaces are cut at angle of 30–90°, which are closed by metal mesh fixed on anode. Deflector of electrons (4) is located around cathode (2) and anode (1). Deflector of electrons (4) is fixed on ceramic base coaxially with anode (1). Cathode (2) is located on a straight line passing from the center of the symmetry axis through anode grid (1). Distance from center of axis of symmetry to cathode (2) should be larger than outer radius of anode (1). Special cases of device performance. First, electron reflector (4) has potential of not less than -600 V relative to cathode (2). Second, cathode (2) is located on the straight line passing from the center of the symmetry axis of the device through the middle of the mesh of anode (1) at a distance of not less than 1.1 of the external radius of anode (1).
EFFECT: technical result is reduction of number of destroyed cluster ions.
3 cl, 2 dwg
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Authors
Dates
2020-07-30—Published
2020-02-12—Filed