DEVICE FOR FORMING A BEAM OF CLUSTER OR ATOMIC IONS OF GAS Russian patent published in 2023 - IPC H01J27/14 H01J37/315 

FIELD: accelerator technology.

SUBSTANCE: invention is related in particular to ion sources, and can be used to obtain accelerated cluster or atomic ions. This invention makes it possible to obtain a stable directed flow of ions at the output of the ionizer and can be used both for solving practical problems of optics, micro- and nanoelectronics, and in surface research methods, such as secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS). The device for obtaining cluster and atomic ions contains an electromagnet installed between the housing and the anode, configured to form a magnetic field with an induction of at least 5 mT, the cathode is made of a metal alloy material with an emission temperature of not more than 900°C. The body is made with holes for vacuum pumping and equipped with a cap that performs the function of an electrode, where part of the surface of the cap around the hole is made cone-shaped, while the inner surface of the body and the cap in the ionization region are made with a coating of amorphous silicon oxide up to 100 nm thick.

EFFECT: improvement in the operational characteristics of the device and an increase in the efficiency of ionization of atomic and cluster ions.

8 cl, 4 dwg