CONTROL METHOD OF OUTPUT POWER IN RESONANCE HIGH-FREQUENCY GENERATORS OF PLASMA SOURCES Russian patent published in 2020 - IPC H05H1/46 H01J27/16 

FIELD: plasma technology.

SUBSTANCE: method involves division of operation of generator into two alternating phases, wherein during the first phase at the output of the amplifier, generating a rectangular signal, tracking and compensating phase shift between output voltage of the half bridge and output current, providing a resonance mode of operation, and during the second phase at output of amplifier there formed is zero voltage, at that duration of both phases is controlled and adjustment of average values of output current and output power of generator is provided.

EFFECT: simplified control of output power in resonant high-frequency generators of plasma sources at constant supply voltage of transistor half-bridge of output power amplifier, which allows to eliminate the additional controlled voltage source, reduce the generator dimensions and increase the system efficiency.

7 cl, 2 tbl, 4 dwg