METHOD OF PRODUCING VOLUMETRIC MICRO-DIMENSIONAL NANOPARTICLE STRUCTURES Russian patent published in 2020 - IPC B33Y10/00 B82Y99/00 

Abstract RU 2730008 C1

FIELD: technological processes.

SUBSTANCE: invention relates to additive 3D-technology for production of predominantly volume micro-dimensional nanoparticle structures, which are used in electronics, photonics, medical and other fields. Proposed method comprises sintering nanoparticles on substrate 5, producing aerosol stream with nanoparticles in transport gas stream in unit 1, heating by laser-optical device 6 in the aerosol optimization unit 8 with nanoparticles in the transport gas flow to obtain spherical nanoparticles, transfer of obtained stream through outlet 10 of aerosol optimization unit 8 with nanoparticles to head 3 with nozzle 4 to focus it on substrate 5, nanoparticles aerosol flow with nanoparticles and simultaneously protective gas are fed into said nozzle to focus nanoparticles aerosol flow on substrate and nanoparticles are deposited from focused aerosol flow onto substrate. Sedimentation and sintering of nanoparticles on substrate are carried out in protective gas atmosphere 13, which is created under nozzle.

EFFECT: invention increases flexibility and efficiency of process control, simplifies the device when realizing the method by using a single laser for heating an aerosol with nanoparticles in a stream of transport gas to obtain nanoparticles of spherical shape and sintering nanoparticles on a substrate.

1 cl, 1 dwg, 1 ex

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RU 2 730 008 C1

Authors

Ivanov Viktor Vladimirovich

Efimov Aleksej Anatolevich

Khabarov Kirill Mikhajlovich

Tuzhilin Dmitrij Nikolaevich

Saprykin Dmitrij Leonidovich

Dates

2020-08-14Published

2019-12-23Filed