LASER FORMING MECHANICAL MICROSTRUCTURES ON SUBSTRATE SURFACE Russian patent published in 2012 - IPC C23C4/12 B23K26/14 

FIELD: physics.

SUBSTANCE: method involves deposition of particles of a substance from gas phase through local heating of the deposition region with laser radiation. The substance in gas phase is dispersed in form of an aerosol. The deposition region is locally heated with pulsed laser radiation and the aerosol particles are baked onto the substrate. The pulse duration of the laser radiation is not shorter than that when the heat wavelength in particle is greater than the dimension of the particle in the direction of radiation. Material of said particles absorbs laser radiation.

EFFECT: high efficiency of depositing coatings while maintaining high resolution power of the method.

5 cl, 4 dwg