METHOD OF ESTIMATING HETEROGENEITY OF STRUCTURAL MATERIALS AND INDIVIDUAL INHOMOGENEOUS AREAS BY CONTENT OF CHEMICAL ELEMENTS Russian patent published in 2020 - IPC G01N33/00 G01N23/02 

FIELD: measurement.

SUBSTANCE: invention relates to investigation of materials using X-ray radiation and electron microscope. In implementing the method, an analytical sample is made in the form of specimen cuts, on which sections for analysis are selected. Virtual coordinate grid is formed on the section, in the nodes of which an analytical signal is excited and recorded. Size of the excitation region in each node of the coordinate grid is varied. Analytical signal spread statistics are determined for selected units, lines of virtual coordinate grid. Dependence of the statistical index on the size of the excitation region is plotted. Factors are determined at variables of these dependencies, based on which inhomogeneity of sections of the section is assessed.

EFFECT: possibility of investigating material of any structure and high information value of determination.

9 cl, 5 dwg