EXTRACTION SYSTEM FOR SECONDARY CHARGED PARTICLES, INTENDED FOR USE IN A MASS SPECTROMETER OR OTHER DEVICE FOR CHARGED PARTICLES Russian patent published in 2020 - IPC H01J49/06 

FIELD: mass-spectrometry.

SUBSTANCE: invention relates to a mass spectrometer comprising an extraction system for secondary ions. System (18) comprises: inner spherical deflecting sector (42); outer spherical deflecting sector (44); deflecting gap (46) formed between sectors (42; 44); housing (38), in which sectors (42, 44) are located. Deflecting sectors (42; 44) are shifted at decelerating potentials to reduce energy of ion beam included in deflecting gap (46). System (18) additionally comprises output disc electrode (64), which is shifted at mid-voltage of sectors (42, 44), and two side plates (68), which both face spherical sectors (42, 44), wherein said side plates (68) are shifted to create an electrostatic field perpendicular to output axis (24).

EFFECT: technical result is higher efficiency of secondary charged particles extraction with simultaneous minimization of negative effects of extracting field on primary beam and improvement of output beam quality.

32 cl, 7 dwg, 1 tbl