EXTRACTION SYSTEM FOR SECONDARY CHARGED PARTICLES, INTENDED FOR USE IN A MASS SPECTROMETER OR OTHER DEVICE FOR CHARGED PARTICLES Russian patent published in 2021 - IPC H01J49/06 

FIELD: measuring equipment.

SUBSTANCE: invention relates to a mass spectrometer comprising an extraction system for secondary ions. System (18) comprises: inner spherical deflecting sector (42); outer spherical deflecting sector (44); deflecting gap (46) formed between sectors (42; 44); housing (38), in which sectors (42, 44) are located. Deflecting sectors (42; 44) are shifted at decelerating potentials to reduce the energy of ion beam (16) entering deflecting gap (46). System (18) additionally comprises output disc electrode (64) with outlet through hole (66) located at center relative to output axis (24), wherein said intermediate electrode (64) is shifted at intermediate voltage between housing (38) and sector average voltage (42; 44). Trajectories of secondary ions become more parallel to output axis (24) and approaching said axis.

EFFECT: technical result is improvement of output beam quality due to provision of parallel beam at output of deflection system.

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