METHOD FOR MANUFACTURING POROUS GRAPHENE MEMBRANES AND MEMBRANES MADE USING THIS METHOD Russian patent published in 2021 - IPC B01D67/00 B01D69/10 B01D71/02 C01B32/186 B82Y40/00 

FIELD: nanotechnology.

SUBSTANCE: invention relates to nanotechnology and can be used for the production of waterproof and highly breathable membranes for textile materials, barrier membranes for water, mobile phones and portable electronic devices, filters and gas separation membranes. First, the catalytically active substrate (1) is selected from Cu, Ni, Pt, Ru, Ir, Rh, or a combination thereof. Then a catalytically inactive material selected from molybdenum, tungsten, gold, silver, zirconium, niobium, chromium, or their mixture / alloy, or their oxide systems, or aluminum oxide is deposited on it from the vapor phase. After thermal annealing, a catalytically active substrate (1) with a plurality of catalytically inactive domains (2) is obtained, the size of which essentially corresponds to the pore size (6) in the resulting porous graphene layer (5), after which annealing is carried out in an environment containing 50-90 vol.% of H2, in a carrier gas including Ar, He and Ne or N2, at a temperature of 900-1200°С and a pressure of 1-100000 Pa for 30-120 minutes. A porous graphene layer (5) less than 100 nm thick with pores (6) having an average size of 5-900 nm, at a density of 0.1 to 100×10¹⁰ cm^-2, is obtained on the surface (3) of a catalytically active substrate (1) chemical vapor deposition using a carbon source, for example, methane, ethane, ethylene, acetylene and their mixtures, at a volume ratio of 1-1000 parts per one part of hydrogen, at a temperature of 300-1200°С for 1-12 hours. Pores (6) in the graphene layer (5) are formed in situ due to the presence of catalytically inactive domains (2). The obtained porous graphene layer (5) is removed (8) from the substrate (3) by van der Waals peeling, electrochemical exfoliation, ultrasonic and/or thermal action and transferred to another substrate selected from a woven, non-woven or knitted structure, metal or ceramic nets or foam, attaching to one or both sides of the specified substrate, and the substrate (3) is reused to make a porous graphene layer (5).

EFFECT: invention makes it possible to simplify the method for producing porous graphene membranes, improve their mechanical properties, control the pore size, and also ensure large-scale production of such membranes.

15 cl, 12 dwg