METHOD OF GAS-PERMEABLE MEMBRANE PRODUCTION AND GAS-PERMEABLE MEMBRANE Russian patent published in 2008 - IPC B01D67/00 B01D71/02 H01L21/3063 C25F3/12 

FIELD: technological processes.

SUBSTANCE: invention concerns selective membrane production for molecular gas mix filtering and can be applied in compact fuel cells. Method of gas-permeable membrane production includes vacuum sputtering of a metal displaying chemical stability in concentrated hydrogen fluoride solutions in anode polarisation conditions onto monocrystalline silicon plate in closed pattern, and further double-side electrochemical etching of the plate area limited by the mentioned closed pattern. Etching process is performed until its spontaneous cease determined by break of time function curve of anode current on the plate surface not covered by sputtered metal.

EFFECT: increased thickness homogeneity of solid monocrystalline filtering silicon layer, improved membrane durability at higher gas permeability.

31 cl, 9 dwg, 2 ex