METHOD FOR MANUFACTURING OF GAS PERMEABLE MEMBRANE Russian patent published in 2009 - IPC B01D67/00 B01D71/02 B82B1/00 

FIELD: technological processes, filters.

SUBSTANCE: invention is related to the field of selective membranes manufacturing for molecular filtration of gas mixtures and may find application in portable fuel elements. Method for manufacturing of gas permeable membrane includes fragmentary application of metal coatings that are chemically inertial in solutions of hydrofluoric acid with oxidiser on both surfaces of single-crystal silicon plate. Plate is annealed under conditions that provide for creation of ohm contact between applied metal and silicon, and then pore formation process is carried out in silicon by treatment of plate in solution that contains hydrofluoric acid, oxidiser, substance that helps to restore oxidiser on metal surface, and surfactant. Plate treatment is carried out from both sides until pore formation fronts that distribute deep down into plate from surface sections not coated by metal meet each other, with development of separating nanosize layer of single-crystal silicon.

EFFECT: preparation of gas permeable membranes with high efficient permeability and strength with improved yield of membranes, and also simplification of their manufacturing process.

12 cl, 5 dwg, 3 ex