METHOD FOR INCREASING THE STABILITY AND REPRODUCIBILITY OF THE ELECTRO-PHYSICAL CHARACTERISTICS OF A BIOLOGICAL SENSOR Russian patent published in 2021 - IPC C01B32/198 B01J19/12 B82Y30/00 G01N33/50 

FIELD: electronic circuits.

SUBSTANCE: invention can be used in the production of biological sensors based on restored graphene oxide. The method of forming the structure of the restored graphene oxide includes the preparation of the substrate, the formation of a layer of graphene oxide on the surface of the substrate, and the subsequent local restoration of a given area of graphene oxide using laser radiation. The formation of a graphene oxide membrane is carried out on a flexible polymer substrate in several iterations by the method of drip deposition of a graphene oxide solution. The pattern of the area of restored graphene oxide is formed using a microsecond laser with a wavelength of 442 nm and a power of 600 MW. In this case, the fluence of the laser is changed in such a way as to obtain a weakly restored conductive area of restored graphene oxide at low fluence values for the formation of sensor structures and an area with a high degree of restoration, higher conductivity and structuring for use as conductors and interconnects in flexible electronic circuits.

EFFECT: invention makes it possible to increase stability and reproducibility of the electrical parameters of biological sensors based on restored graphene oxide while providing a total resistance of the conducting area of no more than 50 kOhm.

6 cl, 1 ex, 4 dwg