FIELD: measuring technology.
SUBSTANCE: interferometer for measuring linear displacements belongs to the field of measuring technology and can be used to measure linear displacements of moving objects, for example, moving parts of precision machines. The expected result is achieved by the fact that in the design of an interferometer for measuring deviations from straightness, a structure consisting of two corner reflectors is separated in such a way that one of the corner reflectors remains stationary, and the movement of the second corner reflector is judged by the movement of a moving object.
EFFECT: invention is aimed at increasing the functionality of the optical interferometer without reducing the measurement accuracy by separating the structure consisting of two corner reflectors and using this design not only to measure deviations from straightness, but also to measure linear movements of moving objects.
1 cl, 1 dwg
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---|---|---|---|
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|
RU2175753C1 |
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RU2112210C1 |
Authors
Dates
2022-06-15—Published
2021-08-05—Filed