FIELD: measurement technology, specifically, laser interferometric. SUBSTANCE: circuit forms multifrequency diffraction orders-first ( immobile ) and second ( mobile ) optical flows. Their spatial registration makes it possible to create controllable spatially-sensitive region of interference with which aid boundary of examined object leading to diffraction of these orders is scanned and studied. Digital code of present phase incursion is employed to pass judgment on spatial parameters of this boundary, parameters of motion/turn and/or deviation of its form from preset one included. EFFECT: enlarged measurement range. 5 dwg
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Authors
Dates
2001-08-20—Published
2000-02-15—Filed