METHOD DETERMINING SPATIAL PARAMETERS OF BOUNDARY OF OBJECT Russian patent published in 2001 - IPC

Abstract RU 2172470 C1

FIELD: measurement technology, specifically, laser interferometric. SUBSTANCE: circuit forms multifrequency diffraction orders-first ( immobile ) and second ( mobile ) optical flows. Their spatial registration makes it possible to create controllable spatially-sensitive region of interference with which aid boundary of examined object leading to diffraction of these orders is scanned and studied. Digital code of present phase incursion is employed to pass judgment on spatial parameters of this boundary, parameters of motion/turn and/or deviation of its form from preset one included. EFFECT: enlarged measurement range. 5 dwg

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RU 2 172 470 C1

Authors

Leun E.V.

Zagrebel'Nyj V.E.

Teleshevskij V.I.

Serebrjakov V.P.

Zhirkov A.O.

Shulepov A.V.

Dates

2001-08-20Published

2000-02-15Filed