INTEGRATED ELECTROOPTIC MODULATOR Russian patent published in 2025 - IPC G02F1/25 

FIELD: electricity.

SUBSTANCE: invention relates to photonic integrated circuits and can be used in microwave information processing and transmission devices, as well as in computer circuits and optical radiation direction systems. Integrated electro-optical modulator has substrate 1 on which the following components are arranged in series: optical cladding 2, elongated along Y axis waveguide 3, transparent conducting oxide layer 4, elongated along the X coordinate, perpendicular to the Y coordinate, and crossing mainly at angle of 90° waveguide 3, dielectric layer 5, which coincides in width with transparent conducting layer of oxide 4, leaves free its edges and is located above waveguide 3, metal electrode 6, which coincides in width with dielectric layer 5 and is located above waveguide 3, wherein transparent conducting oxide layer 4, dielectric layer 5 and metal electrode 6 form capacitor 8, wherein on free edge of transparent conducting oxide layer 4 there is metal contact 7, silicon nitride is used as material for waveguide 3.

EFFECT: reduced optical losses of the waveguide circuit of the modulator and possibility of operating in the visible wavelength range.

6 cl, 12 dwg