METHOD FOR MANUFACTURING INTEGRATED MICROWAVE DEVICES BASED ON FERRITE MATERIAL OF A PARAMETRIC SERIES OF LITHIUM FERROSPINEL Russian patent published in 2022 - IPC H01F1/34 

FIELD: microwave technology.

SUBSTANCE: invention relates to microwave electronic technology, namely, to methods for manufacturing integrated microwave devices based on ferrite materials. The method includes the preparation of a charge using a binder in the form of ethyl alcohol, sintering of the workpiece is carried out through technological operations of the hot isostatic pressing process. Hot isostatic pressing provides for: the production of a capsule commensurate with the workpiece, placing the workpiece in a capsule with a gap of 0.5-1.0 mm, drying the workpiece in the capsule at a temperature of 130-140°C for 7-8 h, pumping the capsule with the workpiece to a pressure of (3-4)*10^-4 MPa, placing the capsule with the workpiece in the hot isostatic pressing chamber, pumping the chamber to a pressure of (1-2)*10^-3 MPa, filling it with inert gas at a rate of 65-75 MPa/h to a pressure of 130-150 MPa while heating to a temperature of 925-975°C with subsequent exposure for 1.4-1.6 hours, reduction of pressure and temperature at a rate of 45-55 MPa/h and 200-250 C/h, respectively, to climatic norms, sequential extraction of the capsule with ferrite material from the chamber and ferrite material from the capsule.

EFFECT: invention makes it possible to increase the reliability of integrated microwave devices.

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