FIELD: testing.
SUBSTANCE: invention relates to experimental technology for diagnosing plasma and can be used for a flat singular Langmuir probe. In the method for probe-based diagnostics of plasma, including installing a probe in the plasma and recording the current-voltage characteristic, used to determine the parameters of plasma, a protective ring is installed on the probe, the probe is put into the plasma with the protective ring, by means whereof two electrical layers appear on the probe and on the protective ring, overlapping with each other and thereby reducing the area of both electrical layers. In the apparatus for probe-based diagnostics of plasma, containing a power source, a probe, a voltage generator, and a measurement unit, connected to the probe, the probe comprises a protective ring made of a conductive material.
EFFECT: reduction in the error of measurement of the electron density and temperature of a non-stable plasma using a probe with a protective ring at 14 to 21%, as well as creation of an apparatus capable of reducing the effect of the thickness of a double electric layer on the result of probe measurements.
2 cl, 2 dwg
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Authors
Dates
2022-08-11—Published
2021-01-12—Filed