METHOD OF PLASMA DIAGNOSTICS BY LANGMUIR PROBES WITH LEADS PROTECTED BY NON-INSULATED SCREENS AND DEVICE THEREFOR Russian patent published in 2018 - IPC H01J37/00 

FIELD: testing equipment.

SUBSTANCE: invention relates to an experimental technique for plasma diagnostics. Invention involves the use of Langmuir probes with outputs protected by non-insulated screens from outside, by recording the probe at each measuring point of the probe volt-ampere characteristics and their processing, which determines the potential of the space V_s and the corresponding density of the electron saturation current per probe j_es, the plasma energy distribution function of the plasma electrons (EDFS), the temperature T_e and the concentration n_e electrons of plasma. Device for performing plasma diagnostics with Langmuir probes with outputs protected by non-insulated screens from outside contains a vacuum chamber with plasma generating means and a movable main Langmuir probe with a non-insulated shield, the probe positions in the plasma are provided with a point corresponding to the position of the probe 1 in which its screen is removed from the plasma, and in some other place of this vacuum chamber a second mobile probe is installed to measure the comparative parameters of the plasma at the same singular point, in the presence of contact of its shielding screen with the plasma.

EFFECT: technical result consists in reduced errors of plasma diagnostics by Langmuir probes, the outputs of which are protected by non-insulated screens.

2 cl, 6 dwg